塑料真空镀的研究论文+常见问题及解决方法 摘要：考虑到水电镀对于环境的污染性，本文在简述真空镀膜的现状和发展趋势前提下，对真空镀做了一些研究。本文以真空镀铝为目标，研究了在真空溅镀过程中，时间、功率、压力、靶距和材料对其成膜性的影响。研究结果发现：溅镀时间对于成膜厚度的影响是比较大的，对成膜后的外观和附着力影响不大；功率对于成膜后附着力的影响较明显，对成膜厚度和外观影响不大；真空压力在适当的范围内，对成膜的影响整体不大；靶距对于成膜后的附着力影响也较明显，基片对成膜性影响同样不大。同时，评价了一些成膜后的检测方法，认为外观检测方面，还存在着一定的缺陷，和机器的稳定性、检查员的经验有着相当密切的联系。另外，也总结了成膜过程中的常见问题点及对应的解决方法。通过系统实验，发现镀铝的最佳参数设置：本文来自辣,文'论#文^网，毕业论文 www.751com.cn时间为5s，功率为6-8kw，真空压力为9.0*10-3 Pa，靶距为8-12 mm。学校学生消防安全教育教案
关键字： 真空镀膜；成膜；镀铝
Study of Vacuum Coating on Plastic
Abstract:Considering the pollution of water electroplating on the environment, in this paper, the current situation and development trend of vacuum coating were discribed and vacuum plating on plastic was studied. The vacuum aluminum-coating as the goal, the effects of time, power, pressure, target distance and material in vacuum sputtering process on the properties of alumium coating has been studied, The research results show that the sputtering time greatly affects the thickness of coating and less affects the film appearance and the adhesion of coating layer.; the power of the sputtering affects the film adhesion obvious and less relation to the film thickness and the appearance of coating layer; vacuum pressure in the appropriate range has little effect the film; target distance for the film adhesion effect is also more apparent, material on the film as little effect. At the same time, the evaluation of some of the film detection method, think appearance detection, there are still some deficiencies, and the stability of the machine, the inspector experience has a close contact. In addition, it summarizes the film-forming process of common problems and corresponding solving methods. Through the experiment, the optimized parameters are : time 5s, power 6-8kw, vacuum pressure is 9 10-3 Pa, target distance 8-12 mm.
Keywords: phosphating; high corrosion resistance; sulfosalicylic acid
目录
1 绪论 1
1.1 真空镀膜的原理 1
1.2 真空镀膜的现状与发展趋势 1
1.2.1 真空蒸发镀膜法 2
1.2.1.1 电阻蒸发源蒸镀法 2
1.2.1.2 电子束蒸发源蒸镀法 2
1.2.1.3 高频感应蒸发源蒸镀法 3
1.2.1.4 激光束蒸发源蒸镀法 4
1.2.2 溅射镀膜 4
1.2.3 离子镀膜 5
1.2.4 黄铜件等真空离子镀替代电镀研究 7
1.2.5 真空镀发展的三大时间段 8
1.2.6 真空镀膜的应用现状 9
1.2.6.1 光学工业的应用 9
1.2.6.2 电子工业的应用 9
1.2.6.3 机械工业的应用 9
1.2.6.4 塑料工业的应用 10
1.2.6.5 其它方面的应用 10
1.2.7 真空镀膜技术的发展趋势 10
2 实验 11
2.1 实验器械与材料 11
2.1.1真空镀机 BM-06 11
2.1.2 材料 12
2.2 镀层的性能评价 12
2.2.1 镀铝层厚度测量 12
2.2.2 镀铝层附着牢度的检测 13
2.2.3 外观检验镀铝薄膜的外观检验 13
3 实验结果与讨论 15
3.1 功率对成膜的影响 15
3.2 时间对成膜的影响 15
3.3 压力对成膜的影响 16
3.4本文来自辣,文'论#文^网，毕业论文 www.751com.cn 靶距对成膜的影响 16
3.5 靶材对成膜的影响 17
3.6 基片对成膜的影响 18
3.7常见问题及解决方法 18
3.7.1 复合后镀膜的镀层发生迁移现象 18
3.7.2 复合膜出现斑点 19
3.7.3 复合膜层间剥离强度差 19
4结论 21
致谢 22
参考文献 23,2882
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