(1) piezoelectric ceramic type high frequency vibrator. Using longitudinal counter pressure
Electric effect, dozens of pieces of PZT (lead zirconate titanate) type is set, the circular wafer pile preloading by dowel bar, after can be 20 ~ 2 x i0 'Hz excitation cross to teach test pieces. The vibrator has for determining of China institute of metrology for high frequency vibration device.
(2) ultra precision piezoelectric knife feed compensation slimming. Using vertical reverse
Piezoelectric effect and principle of leverage amplification, adopting PZT piezoelectric stack actuators - 5 push small single crystal diamond cutting tool in the spindle under the 12, 000 r/rain, implement every turn loose and scattered one hundred time end of feed, which can directly cut the asymmetric optical glass lens surface.
(3) piezoelectric pinch of feeder. Adopting piezoelectric PZT - 5 pairs
Crystal actuators, by double node bending vibration mode, using static and kinetic friction factor of different, transport the tiny parts or parts. In addition, at present is developing a kind of using composite piezoelectric effect of the bionic mechanical insects, in control of the outside world can crawl along the small pipe before and after.
4.2 two-way using piezoelectric effect, the integration of humbug sensor and actuator (deer), medullary small shape research 0 \"by the enlightenment of bionics, the researchers at home and abroad focus on tapping the smart structure, self-sensing actuator (self - sensingactuators), by adopting the method of structure set wei and information set wei to achieve integration. Structure integrated semiconductor process can be used to move the fine processing and special processing methods, such as information collection of main bridge method, electrode method, pay with methods such as time-sharing. Ongoing research since the perception of pressure cell clamp epicenter\" is one of typical application examples, it to cells not only have central function, and as the executor of pliers refers to itself also has the function of measuring pressure and be integrated with sensors and actuators a piezoelectric wafer, make structure HengHua. Reduced volume.
4.3 the depth of the piezoelectric effect development research
So far using piezoelectric sensors and actuators are used almost a piezoelectric effect (sensor use of positive effect, actuators using inverse effect). With the development of the technology test and trembling trembling rinse quantity, requirements of piezoelectric wafer two sensors and actuators miniaturization, set. As a result, the possible need for piezoelectric two, three or even more possible effect for developmental research. Such as use of mechanical and electrical secondary piezoelectric effect and change to four boundary conditions in X0. Quartz crystal group wei tao, a pile type enforcement level can realize badge, emblem of displacement measurement, and can realize badge force measurement. Also, mechanical effect and electromagnetic effect on the similarity theory in the theory and application research yuan is very intentional. Both similarities mainly has now: a) they have the main effect of this system and cross effect Ib) since it is two-way reversible effect, besides a effects, there are two or three times. Induced effects, namely Jian mechanical vibration and electromagnetic vibration Jian are similar. (thermal equilibrium) according to the energy balance and maxwell's equation, and also suggests that both from a quantitative point of similarity. The information industry, automation industry in the future, nano technology, MEMS technology in many areas, such as smart materials such as piezoelectric crystals and the piezoelectric (mechanical and electrical coupling) technology is considered to be one of the most promising technology. It is certain that the piezoelectric theory and application technology research and development will enter a new period of development.
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