MATLAB非球面镜轮廓测试技术研究

摘要为解决偏摆式测量非球面过程中遇到的偏心距的调整和计算问题，结合我校引进的科研设备接触式轮廓测量系统Taylor-Hobson PGI 840，以标准球面为例进行了相关研究。建立测量过程中的物理数学模型，推导面形高度值与旋转角度之间的关系公式，并给出偏心距的计算公式和调整方法。基于MATLAB软件对测量过程进行了仿真，设置合理相关实验参数，编写最小二乘法数据拟合程序，计算偏心距大小并给出精度分析。简要介绍Taylor-Hobson PGI 840轮廓仪系统相关参数、工作原理以及操作界面。以一标准球面进行了具体实验，对偏心距的计算和调整误差来源给出具体分析。最终经过调整将偏心距调整到了1.806mm。结果表明：通过面形高度和转动角度之间的关系来确定并调整偏心距是一个较为简单而有效的方法。使用更为精密的转盘能有效提高实验精度和这种调整方法的实用性。60127

毕业论文关键词偏摆式轮廓测量偏心距最小二乘拟合精度分析

毕业设计说明书（论文）外文摘要

Title The research of profilometry of asphere

Abstract

In order to solve the problem of adjusting and calculating eccentric distance encountered in the partial pendulum measurement of asphere , the correlation research of the standard sphere ,as en example ,is performed in combination with the contact profile measurement system--Taylor-Hobson PGI 840. We set up the physical and mathematical model of the measurement, derivate the relation formula between the surface height value and the rotation angle , also the calculating formula and the adjustment method is given. We perform the simulation of the measurement process basing on MATLAB software, set reasonable experimental parameters, preparation of least squares fitting procedure data, calculate the eccentricity and give the accuracy analysis. A brief introduction to the Taylor-Hobson PGI 840 profilometer system of the related parameters, working principle and operation interface is made. We carry out specific experiment using a standard spherical in the laboratory, the specific analysis of the eccentricity of the calculation and adjustment of the sources of error are given. The eccentricity is adjusted to 1.806 mm after the final adjustment. The results show that: the relationship between the surface height and angle of rotation to determine and adjust the eccentricity is a simple and effective method. The use of more precise turntable can effectively improve the practicability of the experimental accuracy and the adjustment method.

Keywords partial pendulum profile test eccentricity the least-squares fitting precision analysis

1 引言 3

1.1 论文研究背景 3

1.2 论文主要研究内容及工作 3

2 偏摆式非球面检测技术 3

2.1偏摆式非球面检测技术的测量原理 3

2.2偏摆式非球面测量技术发展现状 5

2.3 原理分析 6

2.4 本章小结 9

3 基于MATLAB的仿真实验 10

3.1 仿真综述 10

3.2 仿真过程 MATLAB非球面镜轮廓测试技术研究:http://www.751com.cn/wuli/lunwen_65500.html