摘要自由曲面光学元件有诸多优点，在光学成像系统中使用时，不仅可以有效校正系统像差、提高成像质量，还可以减少系统单元数量及重量。在高性能照明系统设计中使用，可以有效提高光能利用率，为设计提供了相当大的自由度。但制约其广泛应用的瓶颈就是高精度的面形检测。
本论文针对检测自由曲面的多重倾斜波面补偿非零位干涉测量的方法，着重研究了该方法中的关键元件微透镜阵列的点源规划方案。首先围绕核心元件微透镜阵列进行了光路仿真并研究了其光学参数的测量方法。然后根据微透镜阵列点源规划的目的，研究了其实现方法，并提出了两种方案：一是利用液晶光阀技术来实现点源规划，但由于目前液晶光阀的技术限制，其波前畸变只达到0.551λ不满足点源规划所需0.1λ，所以无法适应于微透镜阵列的点源规划中；二是利用针孔掩模技术来实现点源规划，通过仿真得到其波前畸变为0.0842λ，所以可以用其进行微透镜阵列的点源规划。
关键词  光学自由曲面  微透镜阵列  点源规划  液晶光阀   9522
毕业设计说明书（论文）外文摘要
Title   The point source plan of the micro-lens array based on liquid   crystal technology                                
Abstract
Optical free-form surfaces have many advantages, when applied in the optical imaging systems, not only can they effectively eliminate the system aberration and improve the image quality, but also the quantity and weight of the system units can be reduced. When used in the design of high-performance lighting system, they can effectively raise the utilization rate of the light energy, and offer a deal of freedom for the design at the same time. But, restrict it’s widely used bottleneck is high precision surface shape detection.
    According to the free-form surface detection method about multi-tilt wavefront compensation for non-null interferometry, the article focuses on the point source plan of the micro-lens array which is the key element in this method. Firstly, the optical path simulations have been done around micro-lens array and give a research on the measurements of its optical parameters. Then, according to the purpose of the point source plan, two proposals are proposed. One is that using the liquid crystal light valve technology to achieve the point source plan. However, due to technical limitations of the liquid crystal light valve at present, its wavefront aberration is just 0.551λ, can’t reach to the level of 0.1λwhich the point source plan requires. So it can’t be applied to the point source plan. The other is that using the pinhole mask technology, and its wavefront aberration is 0.0842λwhich is obtained by the simulation. So we take this method to achieve the point source plan of the micro-lens array.
Keywords  optical free-form surface  micro-lens array  point source planning  liquid crystal light valve  
目   次
1 绪论    1
1.1 背景及意义    1
1.2 国内外研究状况    2
1.3 研究内容    3
2 光学自由曲面面形检测的研究    4
2.1 现有自由曲面主要检测手段综述    4
2.2 基于微透镜阵列的自由曲面面形的非零位检测    7
2.3 微透镜阵列点源规划的目的及实现方法    8
2.4 本章小结    9
3 微透镜阵列的光路仿真与光学参数测量    10
3.1 微透镜阵列原理    10 基于液晶技术的微透镜阵列通道选择开关设计:http://www.751com.cn/wuli/lunwen_8273.html