摘要微机械加速度传感器是一种重要的惯性器件，在航空航天、汽车工业、石油探测和地震预报等领域中有着广泛的应用。“三明治”加速度计具有测量精度高、噪声特性好、漂移低、温度敏感性小和功耗低等优点，受到了广泛关注。
本文根据性能要求进行了对一种“三明治”加速度计进行了结构设计。首先介绍了“三明治”加速度计工作原理和工艺流程，并进行了详细的理论推导。然后根据量程和分辨率要求进行了结构设计，确定了“三明治”加速度计具体结构。理论分析结果表明，所设计的加速度计的分辨率达到0.041mg,量程为53.5g，满足了设计要求。采用有限元分析软件ANSYS对结构进行了仿真分析，验证了理论设计。最后，分析了工艺误差对加速度计性能的影响，分析结果表明在加工误差范围内，加速度计结构依然满足设计要求。6972
关键词 “三明治”加速度计 结构设计 量程 分辨率
毕业设计说明书（论文）外文摘要
Title The design technologies of the “sandwich” micro accelerometer
Abstract
The micro machined accelerometer is a very important kind of micro inertial device which is used in aeronautics and astronautics, automobile industry, petroleum exploration, earthquake forecast and so on. The “sandwich” micro accelerometer have the advantage of high measurement precision、good noise characteristic, low drift, low temperature sensitivity and power consumption. Because of these advantages, the “sandwich” micro accelerometer was extensively studied.
In this paper, a “sandwich” accelerometer was designed. First, the working principle and process were introduced and the theories of capacitive accelerometer described in detail. Then the structure was designed based on the test range and resolution，and the specific structure of “sandwich” accelerometer was determined. According to the results of theoretical analysis,the resolutin of the accelerometer reaches to 0.041mg,and the range of 53.5g, which meet the design requirements. The finite element analysis software ANSYS was used to simulate the structure and the simulation results are coincide the the theoretical design. At last,the impacts of process errors on the performance of the accelerometer were analyzed. The results show that the structure of the accelerometer still meet the design requirements within the range of process errors.
Keywords “Sandwich”accelerometer Structural design Test range Resolution
目录
第一章 绪论 1
1.1研究的目的与意义1
1.2 MEMS加速度计的研究及发展现状 2
1.3论文主要内容5
第二章 三明治式加速度计工作原理 6
2.1 “三明治”加速度计的工作机理6
2.1.1 结构组成 6
2.1.2 动力学6
2.2 “三明治”加速度计理论分析 10
2.2.1 挠性梁的设计 10
2.2.2 负刚度计算 11
2.2.3 布朗噪声 12
2.2.4 量程理论分析 12
2.3 “三明治”加速度计加工工艺 12
2.4 本章小结 14第三章 结构设计与仿真分析15
3.1结构设计 15
3.1.1电容的选择 15
3.1.2质量块尺寸 16
3.1.3支撑梁尺寸 17
3.1.4“三明治”加速度计性能参数理论分析 18
3.2 仿真分析18
3.2.1 模态仿真19
3.2.2 静力学仿真23
3.3 本章小结25
第四章 加工误差分析 27
4.1 支撑梁加工误差分析27 ANSYS三明治加速度计设计技术仿真+文献综述:http://www.751com.cn/jixie/lunwen_4719.html