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摘要由于自由曲面元件复杂的面形、极大的自由度导致对其进行高精度检测和加工存在着较大的难度。因而限制了其得到更广泛的应用，所以自由曲面元件的高精密度检测成为了光学领域的一个发展瓶颈。目前各国还没有掌握成熟可靠的手段，主要存在的问题如检测效率低、精度无法满足要求、可靠性不高等。而倾斜波面非零位干涉法（Tilted-Wave- Interferometry，TWI）不但能够很好的解决这些问题，还具有较大的测量范围及较好的通用性，但是要开发出针对自由曲面检测的倾斜波面非零位干涉系统仍需要相应的技术改进。23285
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我们针对倾斜波面非零位干涉系统提出的技术要求，研究了为干涉系统提供点光源的光纤型点光源发生器。具体内容有：
（1）研究了倾斜波面非零位干涉系统的数理模型以及工作原理。
（2）研究并设计了符合技术指标的点光源发生器，并对其中的具体器件作出了合理选择。
（3）研究了光纤阵列的加工工艺并进行了相应的设计，讨论了会影响误差的因素提出了解决办法。
最后，对本论文所研究的工作进行总结。
关键词：自由曲面测量，倾斜波面非零位干涉，光纤型点光源发生器，光纤阵列
毕业设计说明书（毕业论文）外文摘要
Title The Design of Optical Fiber Array Point Light Source Generator for the Tilted Wave Interferometer (TWI)
Abstract
Because the surface of free surface element is complex and great freedom so it is very difficult to carry on the high accuracy detection and processing.It is limited to be more widely used, so the high precision detection of free surface element has become a bottleneck of the development of the optical field..There is no master mature and reliable means, the main existing problems such as low detection efficiency, accuracy can not meet the requirements,and the reliability is not high.While Tilted-Wave- Interferometry can not only solve these problems well but also has a wide range of measurement and good universality, but to develop a tilted wave interferometer still needs the corresponding technical improvement.
In order to meet the technical request of the tilted wave interferometer.We researched on the optical fiber type point light source generator to provide a point light source for interferometric system based on interference principle.The specific content:
(1) Study on the mathematical model of inclined surface non zero interference system and working principle.
(2)Researched and designed of the light source generator which meet the technical requirements, and make a reasonable choice for the specific device.
(3)Study on the processing technology of optical fiber array and discusses the factors that might affect the error and put forward the proposed solutions.
Finally, we summarizes the work of this thesis.
Keywords Freeform surface measurement TWI Optical Fiber Array Point Light Source generator Optical Fiber Array
目 次
1 引言 1
1.1 研究背景 1
1.2 国内外研究现状 1
1.2.1 相位测量法 2
1.2.2 探针法 2
1.2.3 哈特曼波前探测法 2
1.2.4 干涉测量法 2
1.3 研究内容 4
2 光纤阵列型点光源发生器的作用原理 5
2.1系统数学模型 5