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中文摘要在传统的光学系统中，常采用球面元件来矫正像差从而实现光学系统的设计要求，但是使用球面元件依然存在一些不足之处。相比较来说，在光学系统中使用非球面光学元件更有优势，主要体现为不仅可以提高系统矫正像差的能力，还可以降低光学系统的复杂性并减小其尺寸。所以，非球面光学元件被大量地应用于各个领域当中。高测量精度和大的动态范围使得夏克-哈特曼波前传感器的应用范围非常广泛。本文主要研究了利用Shark-Hartmann波前传感器检测非球面反射镜面形的非零位检测方法，以及后续的光斑质心计算和误差分析方法研究。同时，利用Zemax对设计光路进行仿真，通过自定义椭球面面形并利用Zernike多项式向待测面加入不同面形误差，来观察和分析像平面上光斑质心位置的变化，以此来验证光路的实验可行性。25505
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毕业论文关键词 Shart-Hartmann波前传感器 非零位检测 动态范围 灵敏度Zemax仿真 非球面
外文摘要
Title The Shark-Hartmann Detection Method Of Aspheric Optical Element
Abstract
In traditional optical system,spherical optical element is often used to correct
the aberration so as to realize the design requirements of the optical system,but there is still exist some disadvantages using spherical optical elements.By contrast,the advantages of using aspheric optical elements in optical systems is more obvious,using aspheric optical elements in optical systems not only can improve the aberration correction ability of the optical system,but also can reduce the size of the optical system.Therefore,the application field of aspherical optical elements is becoming more and more widely.At the same time,high precision aspheric surface need the matching testing equipment and methods.Shark-Hartmann wavefront sensor due to its high measuring accuracy and large dynamic range is widely used in all areas of optics.It's advantage is that the measured wavefront don't need to be compensated,thus,reduces the hardware requirements of detection system,make the testing and operation process more convenient.The paper mainly studied Shark-Hartmann wavefront sensor non null testing off-axis aspherical surface on axis and subsequent spot centroid calculation and error analysis，and light path are simulated by Zemax.
Keywords Shark-Hartmann wavefront sensor dynamic range sensitivity non-null
testing Zemax simulation aspheric surface
目 次
中文摘要 0
外文摘要 0
目 次 0
1 绪论 1
1.1 课题研究目的及意义 1
1.2 常用的非球面镜检测方法 1
1.3 Shark-Hartmann波前传感器的发展现状以及发展前景 4
1.4 主要研究内容以及结构安排 5
2 夏克-哈特曼波前传感器的基本原理 6
2.1 夏克-哈特曼法的检测原理 6
2.2 光斑阵列质心的探测 7
2.3 光斑质心偏差计算 8
2.4 波前的Zernike模式描述 9
3 夏克-哈特曼法非零位检测旋转对称非球面 10
3.1 夏克-哈特曼波前传感器的动态范围与灵敏度 10
3.2 非零位检测旋转对称非球面的方案和步骤 11
3.3 检测装置的设计 12
4 Zemax光路仿真 13