二氧化钒薄膜测试研究

毕业设计说明书（论文）中文摘要二氧化钒VO2是一种具有热致相变特性的金属氧化物。随着温度的升高，大约在 68℃附近会发生从低温半导体相到高温金属相的可逆转变，同时伴随着光、电、磁性能的突变。这一特有的性质决定了VO2具有较高的潜在应用价值和广阔的应用前景，如温度传感、环境检测、资源探测、传感器等领域。因此对该领域的研究具有十分重要的科学价值，目前已成为国内外功能材料研究的热点。64995

本文以氧化钒薄膜为研究对象，介绍了二氧化钒薄膜的制备方法，晶体结构，相变机理等物理化学性质，并采用真空腔内激光溅射法制备二氧化钒薄膜，通过实验测得实验数据，从波长，透射率，温度回滞曲线等多个方面对二氧化钒薄膜进行光学特性的研究。与国内外权威资料进行对比，得出结论。

毕业论文关键词：氧化钒薄膜晶体结构相变机理激光溅射光电性能测试

毕业设计说明书（论文）外文摘要

Abstract

Vanadium dioxide VO2 is a kind of thermally induced phase transition properties of metal oxides. With increasing temperature, at about 68 ℃ vicinity of the semiconductor phase occurs from low to high reversible metal phase transition accompanied by optical, electrical, magnetic mutations.The unique nature of the VO2 with high potential value has broad application prospects, such as temperature sensing, environmental monitoring, resource exploration, sensors and other fields. Therefore, research in this field is of great scientific value, functional materials at home and abroad has become a hot research.

In this paper, vanadium oxide thin films for the study, describes the method of vanadium dioxide thin films, crystal structure, phase change mechanism and other physical and chemical properties, and the use of laser sputtering vacuum chamber vanadium dioxide thin films measured by experiment experimental data from the resistor, wavelength, transmittance, temperature hysteresis curve and many other aspects of the optical properties of vanadium dioxide thin film research. In addition, compared with domestic and international authoritative information, draw conclusions.

Keywords: vanadium oxide thin films crystal structure phase transition mechanism laser ablation photoelectric performance test

摘要 I

ABSTRACT II

1 绪论 1

1.1 引言 1

1.2 国内外研究现状 2

1.3 氧化钒薄膜的应用领域 4

1.3.1非制冷红外探测器 5

1.3.2光开关及光存储 6

1.3.3氧化钒薄膜在太赫兹领域的应用 7

1.4 本文主要工作 8

2 二氧化钒薄膜的晶体结构及相变理论 8

2.1 二氧化钒的晶体结构 8

2.2 VO2的相变能带理论 11

2.3 本章小结 12

3 氧化钒薄膜的制备及实验数据处理 13

3.1 实验制备方法 13

3.1.1真空镀膜法 13

3.1.2溅射法二氧化钒薄膜测试研究:http://www.751com.cn/wuli/lunwen_72439.html