摘要硅微机械陀螺仪近年来发展起来新型微惯性传感器，具有体积小、重量轻 、功耗低 、 便于大批量生产等特点 ， 在汽车工业 、 军事应用及工业生产等方面应用广泛。本文在分析硅微机械陀螺仪驱动模态动力学方程和静电驱动力的基础上 ， 对闭环自激驱动电路系统进行了分析 ， 并对各部分电路进行对比与设计 ， 然后对整体环路进行仿真，最后还制作了 PCB 板并进行实验验证。内容如下：(1) 结合硅微机械陀螺仪的简化模型，分析其驱动模态的动力学特性，得出驱动幅值最大值对应的频率即为驱动模态的固有频率。根据梳齿电容的结构 ， 分析其受力情况，并推导的静电驱动力的表达式。(2) 介绍自激振荡的原理，并结合硅微机械陀螺仪对幅值与相位的要求，设计出基于 AGC 环路的自激振荡系统。(3) 通过仿真对比各种已成熟的电路，设计出各模块的电路。主要研究了机电接口电路，移相电路和幅值控制电路。根据陀螺仪的参数算出个部分的关系 ，建立 Matlab 仿真模块，对自激驱动闭环电路进行仿真验证。(4) 按照设计的电路图，焊好电路后进行闭环自激驱动电路实验。通过开环驱动找出驱动模态的固有频率 ， 同时验证自激振荡的相位条件和起振条件 。 监测闭环驱动的波形，分析其振荡频率，验证稳幅作用。59957
毕业论文关键词 硅微机械陀螺仪 驱动模态 自激振荡 AGC 环节 相位控制 幅度控制
Title Title Title Title Design of Closed-Loop Self-Oscillation Circuit forMEMS GyroscopeAbstract Abstract Abstract AbstractMEMS gyroscope is a new type of tiny inertial sensor developed in resentyears . With the superiority of small volume ,light weight ,low powerconsumption ,easy to volume-produce and so on ,it's widely applied inmilitary and civil areas.Based on the analysis of MEMS gyroscope driven modal kinetic equation andelectrostatic driving force ,the closed-loop self-oscillating drivercircuit system is analyzed ;also compared the existing circuits ,eachpart of circuit is designed; and simulation of the overall loop isintroduced ; finally a PCB board is produced and verified experiments areconducted .Details are as follows ：（ 1 ） Refering to MEMS gyroscope simplified model ,d riven modal dynamicsare analysed to reach the conclusion that the driving frequency of themaximum amplitude corresponds to the natural frequency of the drivingmodal .The electrostatic driving force expression is derived according tothe comb capacitor structure .（ 2 ） T he principle of self-oscillation introduced ,and to meet themagnitude and phase requirements of MEMS gyroscope, the AGC loop-basedself-oscillation system is designed.（ 3 ） Various mature circuits are compared through simulation ,and circuitof each model is designed .Attention is paid to mechanical -electricalinterface circuit ,phase shift circuit and the amplitude control circuit.（ 4 ） In reference to design schematics ,the circuit is welded and tested .Firstly , open-loop drive can provide the natural frequency of thedrive modal and text and verify phase angle condition and start-upcondition of self-excited oscillation .Then ,closed-loop drive waveformis monitored to analysis the oscillation frequency and verify the stablingamplitude action.
Keywords MEMS gyroscope , drive modal , self-excited oscillation , AGClink , phase control , amplitude control

目次

1绪论..1

1.1研究背景与意义..1

1.2硅微机械陀螺仪驱动电路.2

1.2.1硅微机械驱动电路简介..2

1.2.2硅微机械陀螺仪驱动电路研究现状3

1.3本文主要内容4

2硅微陀螺仪驱动模态的工作原理.5

2.1驱动模态的动力学方程..5

2.2硅微机械陀螺仪的驱动机理分析.7

2.2.1硅微机械陀螺仪的结构..7

2.2.2静电驱动力的计算.8 硅微机械陀螺仪自激驱动闭环电路设计+电路图:http://www.751com.cn/zidonghua/lunwen_65299.html