扫描干涉仪动态过程建模

摘要随着光学精密加工技术的出现，非球面已经广泛应用于各个领域，但是非球面检测方法的局限性却限制了非球面的发展。本文研究的是一种基于干涉仪的利用轴向扫描的光干涉非球面测量方法。43616

首先介绍了常用非球面检测方法的局限性，然后指出了利用轴向扫描的光干涉非球面测量方法的优势，对干涉仪扫描过程进行了动态建模。考虑到物面到像面光线会发生畸变，所以为了找到物像之间的一一对应关系，进行了多项式算法的拟合。获取物像关系之后，利用ZEMAX的光线追迹函数，获取干涉仪的两束相干光的光程差，从而对轴向扫描的干涉仪测量进行了干涉图的动态仿真。为了保证干涉图的准确性，进行了拟合公式的误差分析，验证了拟合算法的正确性。

毕业论文关键词面形检测，非球面，光线追迹，多项式拟合

毕业设计说明书外文摘要

Title Modeling Dynamic Process for Scanning Interferometer

Abstract

With the advent of optical precision processing technology, aspherical has been widely used in various fields, but the limitations of aspheric detection methods has limited the development of aspheric surface. This paper is to present the aspheric optical interference measurement which is based on the use of axial scanning interferometer.

First Introduced limitations common aspheric detection method, then pointed out the advantages of the use of axial scan aspheric optical interference measurement and the measurement was introduced to set up the process of scanning interferometer dynamic modeling. Considering the object plane to the image plane of the light will be distorted, so in order to find the corresponding relationship between the object plane and the image plane, polynomial algorithm was fitting. After Getting the relationship between the object plane and the image plane, by using ZEMAX ray tracing function, getted two beams of coherent light 's optical path difference in the interferometer, and thus to be able to measure the axial scanning interferometer of the dynamic simulation of the interferogram. In order to ensure the accuracy of the interference pattern, it was fitted formula error analysis to verify the correctness of the fitting algorithm.

Keywords surface shape detection； asphere； Ray tracing; Polynomial fitting

1 引言 1

1.1 工作背景 1

1.2 光线追迹的发展历史 2

1.3 轴向扫描干涉仪成品介绍 3

1.4 建模难点分析 3

1.5 论文工作介绍 4

2 建模原理介绍 5

2.1 非球面基本知识 5

2.2 利用轴向扫描的光干涉非球面测量方法介绍 7

2.3 追迹原理介绍 8

2.4 干涉图生成原理 11

2.5 干涉图与轴向移动误差关系 12

2.6 建模流程扫描干涉仪动态过程建模:http://www.751com.cn/tongxin/lunwen_44527.html