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摘要全内反射探测亚表面损伤的技术相对于破坏性检测技术有相当大的优势，利用反射光的可见度分析能够方便的得出损伤的尺寸范围。但是，这一方法最主要的是保证入射到光学元件后表面（一般情况下的损伤面）的角度大于或等于全反射角，为了更好地了解在光学元件表面和次表面缺陷，对全内反射显微镜的照明系统进行了研究。设计出了亚表面损伤照明系统的结构，该系统保证了光在元件表面能够发生全反射，并且随着系统的旋转，照射光点固定。23514
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该结构由准直激光入射，经过短焦透镜组会聚，垂直通过球面镜后被待测元件折射，经待测元件折射后以大于或等于全反射角的角度入射到损伤点，最终对反射光的可见度进行分析，得到损伤尺寸范围。
在理论基础上对各部分之间的关系进行了详细推导；基于系统的基本结构，对恰巧发生全内反射的情况下对0.707口径处的光路使用zemax进行了优化，减小了系统的像差，找到了不同元件厚度下的最小通光口径；对参数之间的关系，使用zemax进行了定量分析，找出了待检测元件厚度与系统的相对口径之间的关系。
关键词 照明系统 全内反射显微系统 亚表面损伤 光学设计 优化
毕业设计说明书（毕业论文）外文摘要
Title Research of sub-surface damage detection based on Total Internal Reflection
Abstract
Total internal reflection technique has considerable advantages compared with destructive testing techniques for subsurface damage detection, it uses the visible of light to analysis size range of subsurface damages. However, this method is to ensure that the main optical element is incident on the surface by an angle larger than or equal to the total reflection angle, in order to better understand the optical surface and sub-surface defects.
The collimated laser light is incident from the structure, after the converging lens group at the short focal vertical component measured by the spherical mirror after refraction by the device under test to a total reflection angle of refraction is greater than or equal to the incident angle to the point of damage.
Designed the system architecture, and have a detailed derivation of the relationship between the various parts based on the theory; Optimized the system based on the case of total internal reflection happened to 0.707 diameter of the light path with Zemax; The relationship between the parameters was analyzed quantitatively by using Zemax, and the relationship of component parameters, such as variation of the focal length, between the curvature of the spherical mirror was find out.
Key words Lighting system TIRM Sub-micron detection Optical design
Optimization
目 次
1 引言 2
1.1 亚表面损伤测量的研究现状 2
1.2 亚表面损伤测量的方法 3
1.3 研究内容 6
2 全内反射显微技术测量亚表面损伤 8
2.1 原理 8
2.2 理论分析 9
2.3 全内反射显微镜装置 11
2.4 全内反射显微技术用于损伤容限的定量分析 14
3 基于全内反射法的亚表面损伤检测系统的照明系统 17
3.1 研究照明系统的背景及意义 17
3.2 照明系统设计要求与目标 17
3.3 设计思想论证 18
4 照明系统设计 20
4.1整体结构 20
4.2 理论推导及系统模拟分析 21
4.3总结 39
5 结束语 41
致 谢 42