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摘要随着科学技术的发展，越来越多的场合需要对光学元件或光学系统进行精确的测量。这是保证光学元件的加工质量，提高光学系统的精度的关键。 因此研究受环境振动影响较小的同步移相干涉系统显得十分重要。 论文研究了基于斐索型干涉系统的同步移相干涉系统，将参考镜用λ/4波片代替。然后通过两个正交的相位龙基光栅将其分为四束光强相等的光线，偏振阵列实现了对其相位进行变换，以获得四幅移相干涉图像。 论文给出了本系统的光路图，利用琼斯矩阵分析了本系统的原理和移相过程。 ，在ZEMAX软件中进行了光学设计，运用多种分析功能验证了系统设计的合理性。最后仿真得到干涉图像，并将仿真的结果与理论结果相比较，计算得ZEMAX 仿真误差为0.22%。 26764
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关键词 干涉测量 同步移相 光栅分光 ZEMAX
Title Research on A Testing Technology of Fizeau Simultaneous
Phase-shifting Interference Based on Polarization Phase Shift
Abstract
With the development of the science and technology, optical elements and optical systems should
be required to be tested accurately in more and more occasions. This is the key to ensure the
processing quality of the and improve the accuracy of the optical systems. Therefore, the research
on the simultaneous phase-shifting interferometer system which is less affected by environmental
factors is of significance.
In this paper, a simultaneous PSI which based on Fizeau interferometer is designed. In this system,
the reference mirror is replaced by a quarter-wave plate. And then this beam of light can be pided
into four beams by two orthogonal phase Ronchi gratings. The phase of the lights are shifted by
the polarizer-array, in order to obtain four phase-shifted interference images.
The optical path diagram is given in this paper, Jones Matrix is used to analyze the principle and
the process of phase-shifting of this system. Then, the optical system is designed in ZEMAX, and
a variety of analysis functions are used to verify the rationality of design. Finally, the interference
image is simulated. Comparing the simulation result with the theoretical result, the 0.22% error of
the ZEMAX simulation can be calculated.
Keywords Interferometric measurement Simultaneous phase-shifting Grating splitting ZEMAX
目 次
1 绪论 · 1
1.1 课题背景 · 1
1.2 课题意义 · 1
1.3 国内外研究现状 1
1.4 本课题的主要工作 · 3
2 同步移相干涉的基本方法研究 4
2.1 基于棱镜分光的移相干涉方法 4
2.2 基于相位掩膜板的移相干涉方法 · 5
2.3 基于光栅分光的移相干涉方法 6
2.4 移相干涉系统结构 · 6
2.5 本章小结 · 7
3 同步移相干涉系统设计及原理 8
3.1 整体系统 · 8
3.2 分光系统 · 13
3.3 移相系统 · 15
3.4 本章小结 · 16
4 利用ZEMAX软件对本系统的仿真测试 17
4.1 整体光路设计 · 17
4.2 准直扩束系统光路设计 · 18