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摘要表面等离子体光学自二十世纪初人们发现表面等离子体共振现象以来得到了高速的发展，同时基于此种现象的表面等离子体共振(Surface Plasmon Resonance，SPR）传感器在环境监测、医疗卫生等方面得到了广泛的应用。作为一种新型的传感器，SPR 传感器主要是通过监测共振峰位置变化反映金属表面物质折射率的变化情况来分析物质性质。目前主要的工作是通过研究 SPR 传感器结构参数对共振特性的影响来获得最优结构参数提高传感器灵敏度，本文立足于金属光栅耦合式共振传感器，通过改变金属光栅结构参数得到较高灵敏度的光栅耦合传感器。 本论文基于表面等离子体共振原理和严格耦合波分析方法（RCWA），应用Rsoft 模拟软件，模拟金属（Au）光栅，通过改变光栅结构参数，得到金属 Au 光栅在不同结构参数下的 SPR 共振传感特性曲线，进而分析了不同结构参数对表面等离子体共振灵敏度的影响。本文分析了光栅深度和光栅占宽比对共振的影响从而得到了获得最大的 SPR 共振深度时的光栅结构参数。本文得到的 Au 金属光栅灵敏度为203.4 °/RIU，高于文献[31]的173.3 °/RIU。最后本文又模拟了材料为 Ag的光栅耦合传感器在与金属（Au）光栅相同结构参数时的 SPR 共振曲线，比较了Ag和Au 的SPR 半高峰全宽和共振深度。61101
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毕业论文关键词： 表面等离子体共振 金属光栅 共振光谱 严格耦合波分析法
Title design and characterization study of surface plasmon resonance sensor based on metal grating structure
Abstract Since the surface plasmon resonance phenomenon had been discovered in the early twentieth century， surface plasmon optics has been developed rapidly. And the surface plasmon resonance (Surface Plasmon Resonance, SPR) sensor which is based on this phenomenon has been widely applied in environmental monitoring, health care. As a new sensor, SPR sensors reflect the changes of the refractive index of the metal surface by monitoring the formant position to analyze material properties. At present the main research work is obtain the optimal structure parameters to improve the sensor sensitivity by research how the SPR sensor structure parameters influence the resonant characteristics, in this paper, based on the metal grating coupled resonance sensor, We change the structure parameters of metal grating to get a high sensitivity grating coupler sensor . This thesis is based on surface plasmon resonance theory and rigorous coupled-wave analysis method (RCWA), applies Rsoft simulation software to simulate the metal (Au) grating, change the parameters of grating structure to obtain the metal Au gratings’ characteristic curves at different structural parameters of SPR resonance sensing , and then analyzes the influence of the different structural parameters on the sensitivity of surface plasmon resonance. This paper analyzes the influence of the grating depth and width ratio on the resonant to obtain the grating structure parameters grating when getting a maximum depth of SPR resonance. in this thesis we obtain the sensitivity of Au metal gratings is 203.4 °/ RIU, higher than the literature [31] of 173.3 °/ RIU. Finally, we also have simulated the SPR resonance curve of Ag which has the same grating parameters of the structure as the metal grating coupler sensor (Au), then comparing Ag and Au’ SPR resonance depth.
Keywords： surface plasmon resonance metal grating Resonance Spectroscopy rigorous coupled-wave analysis method