透明导电氧化物薄膜的制备技术及性能研究

菜单

摘要:氧化镉是一种直接窄带隙n型半导体氧化物。氧化镉（CdO）薄膜是首批透明导电氧化物半导体之一。氧化镉具备低电阻率、高载流子浓度、在可见光区域内高透过率等特点，被广泛用于太阳能电池、气敏传感器、透明电极等领域。然而氧化镉的禁带宽度过窄，可通过掺杂其它元素或调解工艺来增大其禁带宽度，从而改善其光电性能。60005

本文中，首先对氧化镉薄膜的应用、制备、性能进行了综合回顾。然后详细介绍了制备氧化镉薄膜的两大技术，分别为汽相技术和溶液技术。气态技术包括热蒸发、脉冲激光沉积、溅射和有机金属化学气相沉积，溶液技术包括化学浴沉积、SILAR 、电化学沉积、溶胶-凝胶法和喷雾热分解。最后又介绍了各种掺杂剂和掺杂水平对氧化镉薄膜光电性质的改变情况。

毕业论文关键词：氧化镉薄膜，半导体，光电性能，载流子浓度，掺杂剂，制备技术

Abstract: Cadmium Oxide (CdO) is n type semiconductor oxide with a direct narrow band gap. Cadmium Oxide (CdO) thin film is one of the first transparent conducting oxide semiconductors. CdO has the properties of low resisitivity,high carrier concentration,and high transmittance in visible range.So it is widely used as solar cells,gas sensor,transparent conducting electrode,etc.however,the optical band gap of CdO is relatively small,we can dop with other elements or adjust the technological parameters to increase the optical band gap,thus improve its electro-optical properties.

In this article, we provide a comprehensive review related to the‘application -preparation-property’ triangle of CdO thin films. First,we describe applications involved in electrochemical capacitor, photoluminescence, gas sensing, solar cells and thermo-emf of CdO thin films.Then we introduce two big preparation techniques of CdO thin films in detail,they are vapour phase technique and solution phase technique. these two techniques can be pided into many specific techniques. Vapour phase techniques include thermal evaporation, pulsed laser deposition , sputtering , and metal organic chemical vapour deposition. Solution phase techniques include Chemical bath deposition , SILAR , electrochemical deposition , solegel and spray pyrolysis. Finally,we also include the variation of electro-optical properties that dopants and dopant levels act to CdO thin films.

Keywords: CdO thin films, semiconductor, electro-optical properties，carrier concentration，dopants，preparation techniques.

1 引言 3

1.1电化学电容器 4

1.2 光致发光 4

1.3 气敏 5

1.4 太阳能电池 5

1.5 热电动势 6

2 氧化镉薄膜制备技术 6

2.1 汽相技术 7

2.2 溶液技术 9

3 薄膜性能的讨论与分析 13

结论 14

参考文献 15

致谢 16

1 引言

在最近几年，氧化镉薄膜由于在光电装置和化学传感器方面的潜在应用已引起相当大的关注。虽然镉及其化合物是有很大毒性的，但它仍旧是电池产品、着色颜料、钢铁腐蚀保护、控制核裂变里中子的屏障的关键组成部件。氧化镉薄膜在很多领域被广泛应用着（也是我们不断探索研究其制备技术和性能的根本原因），如电化学电容器、光致发光、气敏、太阳能电池、热电动势等。下面我将具体介绍氧化镉薄膜在这几个方面的的应用。