摘要本次论文对共轭差分平面绝对检验技术进行了研究。为了消除实验中参考面所带来的误差。人们发明了差分干涉法(伪剪切法),此方法向X,Y轴分别移动得出相位差并且将其相减,从而消去参考面的误差。但是由于零位,x轴,y轴位置三组数据相关,会出现一些无法避免的的误差。而共轭差分法分别向轴两侧做一个像素的位移,然后对同轴两个共轭位置的信息进行处理,仅为两组数据相关,减小了差分法实验中两次在零位置所产生的误差。经过大量实验和数据处理,得到了光学元件波面信息。与之前的方法对比,得出结论更为精确有效的体现了面型的变化。64815
毕业论文关键词:绝对检验 差分法(伪剪切法) 共轭差分法
毕业设计说明书(论文)外文摘要
Title An absolute test for conjugate differential surfaces
Abstract
This paper studied the conjugate difference plane absolute test technology. In order to eliminate the error which caused by the reference plat in the experiment, people invent the method of differential interferometry (pseudo-shear method), this method move a pix on the X, Y axis respectively, phase difference is given and its subtraction, thereby eliminating the reference surface error. But due to zero, X axis, Y axis position of the three group of data correlation, there will be some inevitable errors. While the conjugate difference method to do on both sides of the axis displacement of a pixel, the coaxial two conjugated location information is then processed, only two sets of data, decrease the error that two times difference method in experiment in the zero position. After a lot of experiments and data processing, obtained the optical wavefront information. Compared with previous methods, the conclusion is more accurate and effective reflects the shape change.
Keywords Absolute test Difference method (pseudo-shear method)Conjugate difference method
目 次
第一章 绪论 1
1.1 课题的研究背景及意义 1
1.3 论文的主要研究工作 3
第二章 光的干涉和干涉仪原理 4
2.1 干涉原理 4
2.1.1 波的独立传播和相干迭加原理 5
2.2 干涉仪原理 5
2.2.1 泰曼-格林(Twyman-Green)干涉仪 5
2.2.2 斐索(Fizeau)干涉仪 7
2.3 本章小结 9
第3章 光学平面绝对检验的干涉测量 10
3.1 三面互检法 10
3.2 伪剪切干涉法(差分法) 13
3.3 共轭差分干涉法 15
3.4 本章小结 17
第四章 平面镜的表面面形测量实验(共轭差分平面绝对检验) 18
4.1 GPIXP型号的Zygo干涉仪 18
4.2 实验装置简图 19
4.3 实验流程 20
4.3.1 待测镜调零及呈现清晰干涉图样 21