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摘要： 蓝宝石图形化衬底对GaN基LED光学性能的改善至关重要。本文阐述了PSS（蓝宝石图形化衬底）制作方法、图形种类以及参数表征和外延生长方法。本实验选择了在两种图形化蓝宝石基板（PSS）上生长了InGaN/GaN薄膜。对不同形状的图形化蓝宝石衬底进行EL谱、PL谱、摇摆曲线和拉曼光谱测试及分析，比较不同参数的PSS-LED的出光效率和发光强度等光学性能，系统地研究图形化蓝宝石衬底的图案对于LED的性能影响，分析不同参数数据的图形对于PSS-LED的性能影响，结果表明PSS对LED光强等光学特性均有明显提高。70223
毕业论文关键词： 发光二极管（LED）；图形化蓝宝石衬底；位错密度；外量子效率；氮化镓
Performance analysis of GaN based LED based on patterned sapphire substrate
Abstract: Sapphire Graphic Substrate is essential for improving the optical performance of GaN-based LEDs. This paper describes the PSS (sapphire graphic substrate) production methods, graphics types and parameter characterization and epitaxial growth methods. In this experiment, InGaN / GaN thin films were grown on two graphical sapphire substrates (PSS). The optical properties of PSS-LED with different parameters such as EL spectrum, PL spectrum, rocking curve and Raman spectroscopy were analyzed and compared. The optical properties such as the luminous efficiency and luminous intensity of different parameters were compared. The effect of PSS on the performance of PSS-LED is analyzed. The results show that PSS has a significant improvement in optical properties such as LED light intensity..
Keywords: Light-emitting diode (LED)；Patterned sapphire substrate；Dislocation density；External quantum efficiency；GaN
目录
摘要 i
Abstract i
1 引言 1
1.1 研究的目的及意义 1
1.2 研究现状和发展趋势 2
1.3 研究内容 4
2 LED简述 5
2.1 LED在光照领域的优势 5
2.2 LED发展中遇到的问题 5
3 PSS的制作方法及参数表征 6
3.1 刻蚀工艺 7
3.2 PSS图形 8
4 PSS的外延生长 11
4.1 MOCVD 11
4.2 外延片制作 12
5 PSS的扩展应用 14
5.1 PSS大功率芯片 14
5.2 PSS技术与激光剥离技术的应用 14
5.3 PSS与空气孔技术相结合 15
6 PSS-LED发光特性测试及性能分析