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摘要MEMS加速度计具有体积小、功能集成、可靠性较高、成本低等优点，是MEMS技术应用的一个重要领域。电容式MEMS加速度计是MEMS加速度计的一种主要的形式。对于电容式MEMS加速度计，采用传统的分立元件设计接口电路很难满足精度和尺寸要求，因此设计与电容式MEMS加速度计结构匹配的接口集成电路具有重要的应用价值。本论文通过对MS3110的应用研究，了解其使用性能和参数设置方法，在此基础上将该芯片用作电容式MEMS加速度计的电容输出接口，实现对该类传感器的高分辨率微电容检测。
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论文主要介绍了基于MS3110的电容式MEMS加速度计微电容读出电路的设计。首先,针对微电容读出电路的整体设计方案，阐述了微电容读出电路的转换原理，并对设计中使用的MS3110通用电容读出芯片和ADS1255模数转换芯片进行了介绍。接着，介绍了设计的微电容读出电路中微控制器的选型，并介绍了所选用的ATmega16单片机。在此基础上，介绍了相关的软件设计和测试结果。
实验结果表明，设计的基于MS3110的微电容读出电路有良好的稳定性和线性度。6233
关键词： 微电容读出电路 MS3110 ADS1255 AVR单片机
毕业设计说明书（论文）外文摘要
Title Design of the micro-capacitor readout circuit of MEMS capacitive accelerometer Based on MS3110
Abstract
MEMS accelerometer has the advantages of smaller in volume, integrated function, high reliability, and low cost.It is an important application field of MEMS technology. Capacitive MEMS accelerometer is a main kind of MEMS accelerometer. Because the interface circuit made up of the traditional discrete components can not meet the demand of precision and size, a matching interface integrated circuit is of great application value for the capacitive MEMS sensor. On the basis of knowing the performance and the method of setting parameters by studing the MS3110 chip carefully, the MS3110 chip is used as the interface circuit of the the capacitive MEMS sensor, and the high resolution dection of micro-capacitance in this kind of sensor is achieved..
The design of the micro-capacitor readout circuit of MEMS capacitive accelerometer based on MS3110 is introduced in this paper. Firstly, the principle of the micro-capacitor readout circuit is expatiated according to the overall design, in addition, the MS3110 universal capacitive readout IC and the analog to digital converter ADS1255 used in this circuit are introduced. Then, the reason for the selection of micro controller and performance of Atmega16 MCU are also presented. On the basis , the software design and the test resaults are aslo introduced.
The test results show that the micro-capacitor readout circuit based on MS3110 has good stability and linearity.
Keywords: the micro-capacitor readout circuit MS3110 ADS1255 AVR
目 次
1 绪论 1
1.1 MEMS电容式传感器微电容检测方法概述 1
1.2 主要研究内容 3
2 总体方案设计及主要芯片介绍 5
2.1 微电容读出电路总体方案 5
2.2 通用电容读出芯片MS3110 5
2.2.1 MS3110内部结构及工作原理 5
2.2.2 MS3110应用特性 7
2.3 ADC芯片ADS1255 13
2.3.1 ADS1255结构 14
2.3.2 ADS1255数据输出格式 15
2.3.3 ADS1255寄存器及指令 15
2.4 微控制器ATmega16 16
3微电容读出电路的硬件设计 18
3.1 MS3110应用电路设计 18